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  • Alpha-Step IQ

Alpha-Step IQ

Scanning stylus (standard): 5-micron radius tip, 60deg angled stylus

Stylus force: 15 mg (nominal setting)

Profile length (max): 10 mm in the right direction 2 mm in the left direction

Maximum step height: 2 mm (for stepping down conditions only)

Scan Length: 10 mm

Scan Speed: 2 μm/s to 200 μm/s

Sampling Rate: 50, 100, 200, 500 or 1000 Hz

Scan Method: Moving stylus, stationary stage

Stylus Control: Manually adjustable force

Range: 1.0 ? 99.9 mg

Resolution: 0.1 mg (~ 0.5mg standard deviation)

Step Height Repeatability: 1) At 20 μm range: 0.0008 μm(8 ?) typical standard deviation1 or 0.1% of measured vertical range.

2) At 400 μmrange 0.005 μm(4000 ?) typical standard deviation or 0.2% of the measured vertical range.

3) At 2000 μmrange 0.030 μm(2 μm) typical standard deviation or 0.5% of the measured vertical range.

Z control : interactive control via software

Maximum sample size: 158 mm diameter

Maximum sample thickness: 21 mm

Maximum sample weight: 1 kg

Throat depth: 81 mm

X/Y maximum travel: 151mm x 80 mm

Stage rotation: 360°, unlimited manual rotation

Leveling: manual and various software leveling of profiles