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  • Dektak 150

SYSTEM

Measurement Technique Stylus profilometry (contact measurement)

Measurement Capability Two-dimensional surface profile measurements;

Optional three-dimensional measurement/analyses

Sample Viewing Selectable magnification, 1 to 4mm FOV

Stylus Sensor Low Inertia Sensor (LIS 3)

Stylus Force 1 to 15mg with LIS 3 sensor

Low Force Option N-Lite+ Low Force with 0.03 to 15mg

Stylus Options Stylus radius options from 50nm to 25m;

High Aspect Ratio (HAR) tips 10m x 2m and 200m x 20m;

Custom tips available upon request

Sample X/Y Stage Manual 100mm (4 in.) X/Y, manual leveling;

Motorized 150mm (6 in.) X/Y, manual leveling

Sample R-Theta Stage Manual, continuous 360 degrees;

Motorized, continuous 360 degrees

Computer System 64-bit multi-core parallel processor, Windows? 7.0;

Optional 23in. flat panel display

Software Vision64 Operation and Analysis Software;Stress Measurement; Cantilever Deflection;Stitching; 3D Stress; 3D Mapping

Vibration Isolation Vibration isolation solutions available

PERFORMANCE

Scan Length Range 55mm (2in.)

Data Points Per Scan 120,000 maximum

Max. Sample Thickness 50mm (2in.)

Max. Wafer Size 200mm (8in.)

Step Height Repeatability <5?, 1sigma on 1m step

Vertical Range 1mm (0.039in.)

Vertical Resolution 1? max. (@ 6.55m range