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  • Bruker Dektak 150

SYSTEM

Measurement Technique Stylus profilometry

Measurement Capability Two-dimensional surface profile measurements

Sample Viewing 640 x 480-pixel (1/3in.-format) camera, USB; fixed magnification, 2.6mm FOV (166X with 17in. monitor);    

Stylus Sensor Low-Inertia Sensor (LIS 3)

Stylus Force 1 to 15mg with LIS 3 sensor; 0.03 to 15mg with N-Lite sensor option

Stylus Options Stylus radius options from 50nm to 25μm;

High Aspect Ratio (HAR) tips 10μm x 2μm and 200μm x 20μm

Sample Stage Manual X/Y/Q, 100 x 100mm X-Y translation,

360° rotation, manual leveling;

Software Dektak software running under Windows XP;Step Detection software (std.);

Vibration Isolation Optional vibration isolation table;

optional table-top vibration isolation system

PERFORMANCE

Scan Length Range 55mm (2.16in.)

Data Points Per Scan 60,000 maximum

Max. Sample Thickness Up to 100mm (4in.), depending on configuration

Max. Wafer Size 150mm (6in.)

Step Height Repeatability 6?, 1 sigma on 1μm step

Vertical Range 524μm (0.02in.) standard; 1mm (0.039in.) optional

Vertical Resolution 1? max. (at 6.55μm range)