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  • Dektak 6M

SYSTEM

Measurement Technique stylus profilometry

Measurement Capability two-dimensional surface profile measurements

Sample Viewing 70X ? 280X zoom magnification

Stylus Sensor Low Inertia Sensor (LIS 3)

Stylus Force 1 to 15mg

Stylus Options ? stylus radius options from 0.2 to 25μm

? High Aspect Ratio (HAR) tips 10μm x 2μm

and 200μm x 20μm

Sample Stage ? manual 150mm (6 in.) X/Y/q,

25 x 100 X/Y translation,

360° rotation; manual leveling

Computer System PC with latest Pentium? processor,

430mm (17 in.) flat panel display

Software Dektak software running under Microsoft

Windows XP?; optional Stress Measurement

software

Vibration Isolation ? vibration isolation table optional

? table-top vibration isolation system optional

PERFORMANCE

Scan Length Range 30mm (1.2 in.)

Data Points Per Scan 60,000 maximum

Max. Sample Thickness 25.4mm (1in.)

Max. Wafer Size 150mm (6 in.)

Step Height Repeatability1 7.5 ?, 1s on 1μm step

Vertical Range 262μm (0.010 in.) standard;

1mm (0.039 in.) optional

Vertical Resolution 1? max. (@ 6.55μm range)